This study investigates the effects of annealing atmosphere (air vs. oxygen) and temperature on the properties of RF-sputtered VO2 thin films. XRD analysis revealed that annealing in an oxygen atmosphere preferentially enhances the formation of the monoclinic VO2 phase over V2O5 and reduces the...

This study investigates the influence of annealing temperature (200–500 °C) and atmosphere (air vs. oxygen) on the properties of VO2 thin films deposited by RF magnetron sputtering. XRD analysis revealed a mixed-phase composition (VO2/V2O5), with oxygen annealing promoting preferential VO2growth at...

Vanadium oxide (VOx) thin films were synthesized using DC magnetron sputtering with a vanadium target prepared by spark plasma sintering (SPS) at 900 °C under Ar+H2 atmosphere. Amorphous VOx films were deposited on glass substrates and annealed in air and oxygen atmospheres at 200–500 °C to study...